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Article: Optical Lithography as the Pink Bunny. (Lithography).(Brief Article)
- Article from:
- Semiconductor International
- Article date:
- January 1, 2002
- Author:
CopyrightCOPYRIGHT 2002 Reed Business Information. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Certainly, the industry knows that optical lithography has its limits and -- someday -- those limits will actually play out. But optical techniques continue to buck predictions, their capabilities moving past the 1 [micro]m mark, then past 0.5 [micro]m ... then past 0.01 [micro]m? In fact, a group at MIT's Lincoln Laboratory (Lexington, Mass.) has reported the optical fabrication of a 9 nm gate. It seems that optical lithography just keeps going...
The group had previously fabricated 25 nm gate length fully depleted SOI transistors, using 248 nm (KrF) lithography with double-exposure chromeless phase-shift masks (PSMs). The latest work is an extension of that, ...