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Article: Silicon pressure sensors gain commodity status. (semiconductor preparation equipment)
- Article from:
- EDN
- Article date:
- March 8, 1990
- Author:
CopyrightCOPYRIGHT 1990 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Silicon pressure sensors gain commodity status Pressure sensors--once heavy, bulky, and expensive to produce--are now available in IC-like dimensions and in easy-to-use packages. The latest generation of these silicon-based sensors uses IC-processing techniques to keep both cost and size to a minimum.
At least one device, for example, has cracked the surface-mount club. Another gives a picture of the level of integration to come; it includes temperature compensation among its on-chip functions. In addition, the new processes are extending the temperature ranges of today's sensors.
The nearby table gives salient features of a sampling of recent pressure ...