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Article: KLA-Tencor Adds In-Line Defect Classification to Latest-Generation E-Beam Wafer Inspection Systems; New Capabilities Accelerate Advanced Process Development While Lowering Overall Cost of Ownership by Up to 50 Percent.
- Article from:
- PR Newswire
- Article date:
- February 19, 2002
CopyrightCOPYRIGHT 2002 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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SAN JOSE, Calif. -- KLA-Tencor Corp. today announced that its latest-generation e-beam wafer inspection system, the eS20XP, now includes in-line automatic defect classification (iADC). This new option speeds time to results for defect classification and review by up to a factor of three when compared to manual review and classification, while simultaneously classifying up to ten times more defects for a given inspection. iADC reduces the cost of ownership (CoO) of e-beam inspection by up to 50 percent by enabling chipmakers to quickly classify and separate physical and electrical defects in real time during inspection. This allows chipmakers to achieve more sensitive ...
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Article: New ratings on Kla-Tencor Corp, Walt Disney ...
M2 Presswire;
December 17, 2001 ;
700+ words
... ... December 2001-MaverickTrader.Com: New ratings on Kla-Tencor Corp, Walt Disney Co The, Home Depot Inc, Texas Instruments ... accord with their rating," says Mr. Burchett. Kla-Tencor Corp (Nasdaq:KLAC) - Negative http://www.mavericktrader ...
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