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Article: Sam coatings for microelectromechanical systems. (Senior Division).(Brief Article)
- Article from:
- Journal of the Colorado-Wyoming Academy of Science
- Article date:
- April 1, 2002
- Author:
CopyrightCOPYRIGHT 2002 Colorado-Wyoming Academy of Science. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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Surface micromachining technology has made many significant advances recently, but release and in-use stiction remain a key problem. Stiction is a term used in reference to the permanent adhesion between the structure and the substrate. Stiction severely limits the reliability and the lifespan of many microelectromechanical systems (MEMS). Recent developments have shown two possible solutions to stictuion, diamond coating and self-assembled monolayer films (SAM's). This research focuses on the reliability, and application of SAM films. Two types of SAM coatings, octadecyltrichlorosilane [C[H.sub.3](C[F.sub.2])17[SiCl.sub.13], OTS] and 1H, 1H, 2H, ...