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Article: Overlay measurement systems: precision measurement technology in IC manufacturing.(integrated circuit)
- Article from:
- Advanced Imaging
- Article date:
- November 1, 2002
- Author:
CopyrightCOPYRIGHT 2002 Cygnus Business Media. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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While integrated circuit (IC) patterns continue to shrink, the capacity of dynamic random access memory (DRAM) in mass production is evolving from 128M to 256Mbit, and the minimum linewidth is now 130nm or finer. IC manufacturing relies on miniaturization technologies, and the role of steppers--the key machines in IC production--is crucial.
At the same time, continuing IC sophistication means more advanced measurement and inspection technologies are required to ensure that ICs are manufactured as designed. Simultaneous development of manufacturing and measurement/inspection technology guarantees a bright future for ICs.
In this issue, we focus on the ...