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Article: Celerity Digital MFCs Qualified by Leading Etch Systems Supplier.
- Article from:
- PR Newswire
- Article date:
- March 25, 2003
CopyrightCOPYRIGHT 2003 PR Newswire Association LLC. This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights should be directed to the Gale Group. (Hide copyright information)
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MILPITAS, Calif. -- MILPITAS, Calif., March 25 /PRNewswire/ -- Celerity Group, Inc. today announced that Lam Research Corporation has qualified the Celerity digital mass flow controllers (MFCs) with MultiFlo(TM) technology in the production of Lam 2300(TM) Etch Series and Alliance(R)-based etch systems. Following an extensive six-month evaluation, Celerity's MFCs, marketed under the Unit sub-brand, were qualified for all Lam etch gas panels due to demonstrated superior performance, reliability, and flexibility. Unit analog MFCs have been the standard on Lam systems for a number of years, and this design decision enables Lam to supply semiconductor manufacturing tools ...
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