Article: Cymer Unveils Upgrades for XLA Products


Wireless News
02-26-2008
Cymer Unveils Upgrades for XLA Products

WIRELESS NEWS-February 26, 2008-Cymer Unveils Upgrades for XLA Products (C)2008 10Meters - http://www.10meters.com

Cymer, a supplier of light sources used in semiconductor lithography, announced the availability of high-performance (HP) upgrades for its XLA 105, XLA 300, and XLA 400 products.
The company stated that the upgrades offer customers better metrology and increased productivity as compared to competing light source systems.

The HP upgrade to the XLA 105 will be used on critical- to mid- critical dry ArF layers, and offers customers accurate E95 reporting to support better critical dimension (CD) control, in ...

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