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Article: California Inventor Develops Semiconductor Device Fabrication Method
- Article from:
- US Fed News Service, Including US State News
- Article date:
- July 20, 2006
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ALEXANDRIA, Va., July 20 -- Sunil D. Mehta of San Jose, Calif., has developed semiconductor devices with low voltage and high voltage transistors.
According to the U.S. Patent & Trademark Office: "A process for fabricating a semiconductor device having electrically isolated low voltage and high voltage substrate regions includes low voltage and high voltage trench isolation structures in which a deep portion of the high voltage isolation trench provides electrical isolation in the high voltage regions. The high voltage isolation trench structures include a shallow portion that can be simultaneously formed with the low voltage trench isolation structures."
An abstract of the invention, ...