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Article: Nanotechnology: Integrated Processing Systems for Ultra-Precision and Ultra-Fine Products
- Article from:
- Mechanical Engineering
- Article date:
- April 1, 1997
- Author:
CopyrightCopyright American Society of Mechanical Engineers Apr 1997. Provided by ProQuest LLC. (Hide copyright information)
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Nanotechnology: Integrated Processing Systems for UltraPrecision and Ultra-Fine Products. Norio Taniguchi. Oxford University Press, 198 Madison Ave, New York, NY 10016. 1996. 406 pp. $165.
The manufacture of integrated circuits and optoelectronic devices, for example, calls for accuracies in the nanometer range (approximately ...
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