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Article: Texas Inventors Develop Buffer Trench Isolation Structure Manufacturing Method
- Article from:
- US Fed News Service, Including US State News
- Article date:
- January 10, 2007
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ALEXANDRIA, Va., Jan. 10 -- Rick L. Wise of Fairview, Texas, and Mark S. Rodder of University Park, Texas, have developed a method of manufacture for a trench isolation structure with an implanted buffer layer.
According to the U.S. Patent & Trademark Office: "The present invention provides a trench isolation structure, a method of manufacture therefor and a method for manufacturing an integrated circuit including the same."
An abstract of the invention, released by the Patent Office, said: "The trench isolation structure, in one embodiment, includes a trench located within a substrate, the trench having an implanted buffer layer located in the sidewalls thereof. The trench isolation ...