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Article: Japanese Inventors Develop Pattern Forming Method
- Article from:
- US Fed News Service, Including US State News
- Article date:
- April 10, 2007
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ALEXANDRIA, Va., April 10 -- Yasuhiko Sato, Tsuyoshi Shibata, Junko Ohuchi and Yasunobu Onishi, all from Yokohama, Japan, have developed a method for forming pattern.
According to the U.S. Patent & Trademark Office, the invention relates to a "method of forming a pattern, which comprises forming a masking material layer on a surface of a working film by coating the surface with a solution of a mixture comprising an inorganic compound having a bond between an inorganic element and oxygen atom, and a volatile unit, volatilizing the volatile unit to thereby make the masking material layer porous, forming a resist layer on a surface of the masking material layer, patterning the resist film ...