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New Jersey Inventor Develops Dual Photo-Acoustic Measurement System
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US Fed News Service, Including US State News
- Article date:
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June 11, 2008
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ALEXANDRIA, Va., June 11 -- R. Gregory Wolf of Hackettstown, N.J., has developed a photo-acoustic resistivity measurement system.
According to the U.S. Patent & Trademark Office: "A measurement system for measuring aspects of a wafer combines an apparatus for performing a conductivity measurement, such as a four-point probe system, with apparatus for performing an optical measurement, such as a photoacoustic measurement system. Results are obtained and combined to provide comprehensive data sets describing the characteristics of the thin film substrate therein."
The inventor was issued U.S. Patent No. 7,372,584 on May 13.
The patent has been assigned to Rudolph Technologies Inc., ...
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