News wire article from our research archive:

California Inventors Develop Residual Stress Measurement System

ALEXANDRIA, Va., Sept. 12 -- Gregory U'Ren of Berkeley, Calif., and Olivier Pierron of Sunnyvale, Calif., have developed a method for measuring residual stress.

According to the U.S. Patent & Trademark Office: "The invention comprises devices and methods for determining residual stress in microelectromechanical system (MEMS) devices such as interferometric modulators. In one example, a device measuring residual stress of a deposited conduct material includes a material used to form a MEMS device, and a plurality of disconnectable electrical paths, wherein said plurality of paths are configured to disconnect as a function of residual stress of the material."

An abstract of the invention, ...

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