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California Inventors Develop Residual Stress Measurement System
- Article from:
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US Fed News Service, Including US State News
- Article date:
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September 12, 2008
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ALEXANDRIA, Va., Sept. 12 -- Gregory U'Ren of Berkeley, Calif., and Olivier Pierron of Sunnyvale, Calif., have developed a method for measuring residual stress.
According to the U.S. Patent & Trademark Office: "The invention comprises devices and methods for determining residual stress in microelectromechanical system (MEMS) devices such as interferometric modulators. In one example, a device measuring residual stress of a deposited conduct material includes a material used to form a MEMS device, and a plurality of disconnectable electrical paths, wherein said plurality of paths are configured to disconnect as a function of residual stress of the material."
An abstract of the invention, ...