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Article: South Korean Inventor Develops Shallow Trench Isolation Profile Monitoring Pattern
- Article from:
- US Fed News Service, Including US State News
- Article date:
- November 25, 2008
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ALEXANDRIA, Va., Nov. 25 -- Jung Ho Kang of Gyeonggi-do, South Korea, has developed a method for making monitoring trench isolation pattern.
According to the abstract released by the U.S. Patent & Trademark Office: "A method of making a monitoring pattern to measure a depth and profile of a shallow trench isolation is disclosed. An example method of making a monitoring pattern of a shallow trench isolation profile forms a first pattern on a substrate to monitor a depth of a first shallow trench isolation. In the example method, the first pattern includes a plurality of unequally spaced active regions on the substrate. The example method also forms a second pattern on the substrate to ...