|
|
Article: Publication No. WO/2009/082985 Published on July 9, Assigned to DONGGUAN ANWELL DIGITAL MACHINERY for Substrate Processing Apparatus (Chinese Inventor)
- Article from:
- US Fed News Service, Including US State News
- Article date:
- July 14, 2009
CopyrightCopyright © HT Media Ltd. All Rights Reserved. Provided by ProQuest LLC. (Hide copyright information)
|
GENEVA, July 14 -- Chunwah Fan, China, has developed a substrate processing apparatus with a processing chamber.
The patent has been assigned to DONGGUAN ANWELL DIGITAL MACHINERY CO. LTD., Guangdong, China.
According to an abstract posted by the World Intellectual Property Organization, the invention that refers to a "substrate processing apparatus includes a processing chamber, a platform with many holders holding the workpieces, many heaters and many deposition apparatuses. The processing chamber ...