Article: Patent No. 7,560,941 Issued on July 14, Assigned to FormFactor for Probe Card Motion Compensation Method (U.S., Canadian Inventors)

ALEXANDRIA, Va., July 17 -- Rod Martens, Richard A. Larder and Makarand S. Shinde, all from Livermore, Calif., Benjamin N. Eldridge of Danville, Calif., Gary W. Grube of Pleasanton, Calif., Ken S. Matsubayashi of Fremont, Calif., and Gaetan L. Mathieu of Varennes, Canada, have developed a Method for compensating thermally induced motion of probe card. The inventors were issued U.S. Patent No. 7,560,941 on July 14.

The patent has been assigned to FormFactor Inc., Livermore.

According to the abstract released by the U.S. Patent & Trademark Office: "The present invention discloses a method and system compensating for thermally induced motion of probe cards used in testing die on a wafer. A ...

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