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Article: Patent No. 7,608,390 Issued on Oct. 27, Assigned to IBM for Top Antireflective Coating Composition (New York Inventors)
- Article from:
- US Fed News Service, Including US State News
- Article date:
- November 4, 2009
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ALEXANDRIA, Va., Nov. 4 -- Mahmoud Khojasteh, Wu-Song Huang, and Pushkara R. Varanasi, all from Poughkeepsie, N.Y., Margaret C. Lawson of LaGrangeville, N.Y., Irene Popova of Beacon, N.Y., and Kaushal S. Patel of Wappingers Falls, N.Y., have developed a top antireflective coating composition containing hydrophobic and acidic groups. The inventors were issued U.S. Patent No. 7,608,390 on Oct. 27.
The patent has been assigned to International Business Machines Corp., Armonk, N.Y.
According to the abstract released by the U.S. Patent & Trademark Office: "The present invention discloses a composition suitable for use as a top antireflective coating and barrier layer for immersion ...