Article: Publication No. WO/2009/128855 Published on Oct. 22, Assigned to SIONYX for Getter, Manufacturing Method (American Inventor)

GENEVA, Nov. 4 -- Susan Alie, United States of America, has developed a getter formed by laser-treatment and methods of making same.

The patent has been assigned to SIONYX INC., Beverly, Mass.

According to an abstract posted by the World Intellectual Property Organization: "The present disclosure relates to methods of treating a silicon substrate with an ultra-fast laser to create a getter material for example in a substantially enclosed MEMS package. In an embodiment, the laser treating comprises irradiating the silicon surface with a plurality of laser ...

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