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Home » Publications » Industry magazines » Engineering magazines » EDN Asia » March 2005 »
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    MLA

    "Metrology tool for metal film measurement.(Test & Measurement)." EDN Asia. Canon Communications L.L.C. 2005. HighBeam Research. 25 Apr. 2018 <https://www.highbeam.com>.

    Chicago

    "Metrology tool for metal film measurement.(Test & Measurement)." EDN Asia. 2005. HighBeam Research. (April 25, 2018). https://www.highbeam.com/doc/1G1-130649340.html

    APA

    "Metrology tool for metal film measurement.(Test & Measurement)." EDN Asia. Canon Communications L.L.C. 2005. Retrieved April 25, 2018 from HighBeam Research: https://www.highbeam.com/doc/1G1-130649340.html

    Please use HighBeam citations as a starting point only. Not all required citation information is available for every article, and citation requirements change over time.

Metrology tool for metal film measurement.(Test & Measurement)

EDN Asia
EDN Asia

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March 1, 2005 | Copyright
COPYRIGHT 2009 Reed Business Information, Inc. (US). This material is published under license from the publisher through the Gale Group, Farmington Hills, Michigan. All inquiries regarding rights or concerns about this content should be directed to Customer Service.
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    <a href="https://www.highbeam.com/doc/1G1-130649340.html" title="Metrology tool for metal film measurement.(Test & Measurement) | HighBeam Research">Metrology tool for metal film measurement.(Test & Measurement)</a>

* Designed for on-line and near-line measurements on semiconductor wafers, optical devices, high-density chip-scale packaging and substrate applications

* Uses a combination of microbeam X-ray collimation technology and traditional energy dispersive XRF (EDXRF) spectroscopy

* Non-destructive metrology technique measures thickness and composition of up to five layers of deposited metals simultaneously

* Also determines bulk alloy composition for up to 20 elements

* Use of optically collimated X-rays delivers intensity gains of up to 1000 times over traditional XRF tools

* X-rays generated by 50W X-ray tube are redirected and focused on sample surface

* Available in benchtop, console, and automated wafer handling configurations

* MicroXR microbeam XRF platform

Thermo Electron Corporation

Tel 877-843-7668

www. …


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